How Mounting Pressure Can Affect Wafer Heater Heat Transfer

https://thermal-technology-center.wpsuo.com/how-custom-kapton-heater-designs-solve-difficult-heating-challenges

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result